Position control of a MEMS stage with integrated sensor
نویسندگان
چکیده
منابع مشابه
Design and optimization of a 3-DOF planar MEMS Stage with integrated thermal position sensors
This work presents the design and optimization of a large stroke planar positioning stage in a single-mask MEMS fabrication process. Electrostatic comb-drive actuators were used to control the position and rotation of the 3-DOF stage. Thermal displacement sensors are integrated to provide feedback. Simulations show that we are able to reach a +/-120μm range of motion and +/-30 degrees of rotati...
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